%0 Journal Article
%T Modeling of sensitive elements of pressure sensors based on wide bandgap semiconductors
%A Volkov, V..
%A Frantsuzov, M..
%K film polycrystalline diamond, sensor, semiconductor pressure sensor
%J Actual directions of scientific researches of the XXI century: theory and practice
%D 2015
%N 3
%P 4
%I FSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov