TY  JOUR
TI  Modeling of sensitive elements of pressure sensors based on wide bandgap semiconductors
KW  film polycrystalline diamond
KW  sensor
KW  semiconductor pressure sensor
JO  Actual directions of scientific researches of the XXI century: theory and practice
AU  Volkov, V..
AU  Frantsuzov, M..
PY  2015
IS  3
PB  FSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov