TY  JOUR
TI  Heat treatment of the silicon: modifying surface morphology
KW  silicon
KW  heat treatment
KW  roughness
JO  Actual directions of scientific researches of the XXI century: theory and practice
AU  Kozlovskiy, A..
AU  Kaliekperov, M..
PY  2015
IS  3
PB  FSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov